Hirata Corporation of Europe Ltd.

 

SEMICONDUCTOR

Semiconductor

Working together with the world’s leading semiconductor manufacturers. We have developed automatic equipment for the next generation of silicon chips.

  • Foup Opener

  • Wafer Transfer

  • SMIF Pod Opener

  • Wafer Handling Robot

Load Port (FOUP Opener)

(EFEM - Equipment Front End Module) (SMIF Pod Opener)
(Wafer Transfer Robot) (Vacuum Transfer Robot)
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